Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors
نویسندگان
چکیده
منابع مشابه
Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors.
The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400 °C) and against concentrated harsh chemicals such as sodium hydroxide, ...
متن کاملIntegrated Microfluidic Devices Based on Low-Temperature Co- Fired Ceramic (LTCC) Technology
This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques...
متن کاملMicrofabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology
In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LT...
متن کاملFabrication of membranes and microchannels in low temperature co-fired ceramic (LTCC) substrate using novel water-based sacrificial carbon pastes
In this work, 3D structuration of LTCC (Low-Temperature Co-fired Ceramic) for microfluidics was studied, using two novel sacrificial carbon paste compositions. These pastes are based on graphite with a water-soluble vehicle consisting of polyvinylpyrrolidone binder (PVP) dissolved in propylene glycol (PG), which is not aggressive to green LTCC material. Both examined pastes differ slightly in b...
متن کاملLow Temperature Co-fired Ceramic (LTCC) Technology: General Processing Aspects and Fabrication of 3-D Structures for Micro-fluidic Devices
LTCC technology is based on sintering of multi-layered thick-film sheets (50-250μm) or so-called green tapes, which are screen-printed with thick-film pastes such as conductors, resistors, etc. The terms low temperature and co-fired originate from the relatively low sintering temperatures (<900°C) compared to conventional ceramics and simultaneous firing of tapes together with screen-printed th...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Lab on a Chip
سال: 2015
ISSN: 1473-0197,1473-0189
DOI: 10.1039/c4lc01105h